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1. Identity statement
Reference TypeJournal Article
Siteplutao.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W/3GDQK6Q
Repositorysid.inpe.br/plutao/2014/06.03.21.43.07   (restricted access)
Last Update2014:12.09.14.26.58 (UTC) administrator
Metadata Repositorysid.inpe.br/plutao/2014/06.03.21.43.08
Metadata Last Update2018:06.04.23.39.31 (UTC) administrator
DOI10.1109/tps.2014.2314026
ISSN0093-3813
Labellattes: 3979447098275675 3 SilvaJrRossNetoUeda:2014:AdEnMe
Citation KeySilvaJrRossSilvUeda:2014:AdEnMe
TitleAdherence Enhancement of Metallic Film on PZT-Type Ceramic Using Nitrogen Plasma Implantation
Year2014
MonthOct.
Access Date2024, May 20
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size3060 KiB
2. Context
Author1 Silva Junior, Ataíde Ribeiro da
2 Rossi, José Osvaldo
3 Silva Neto, Lauro Paulo da
4 Ueda, Mario
Resume Identifier1
2 8JMKD3MGP5W/3C9JHJ5
3
4 8JMKD3MGP5W/3C9JHSB
Group1 CMS-ETES-SPG-INPE-MCTI-GOV-BR
2 LAP-CTE-INPE-MCTI-GOV-BR
3 CSE-ETES-SPG-INPE-MCTI-GOV-BR
4 LAP-CTE-INPE-MCTI-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 ataide@plasma.inpe.br
2 rossi@plasma.inpe.br
3 lauro.paulo@plasma.inpe.br
4 ueda@plasma.inpe.br
e-Mail Addressmarcelo.pazos@inpe.br
JournalIEEE Transactions on Plasma Science
Volume42
Number10
Pages3173 - 3179
Secondary MarkA1_ENGENHARIAS_IV B1_ENGENHARIAS_III B1_ENGENHARIAS_II B1_INTERDISCIPLINAR B3_MATERIAIS B3_ASTRONOMIA_/_FÍSICA
History (UTC)2014-06-03 21:43:08 :: lattes -> administrator ::
2018-06-04 23:39:31 :: administrator -> marcelo.pazos@inpe.br :: 2014
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
Keywordsannealing
ceramics
ion implantation
metallization
plasma materials processing applications
dielectrics
AbstractLead zirconate titanate (PZT)-type ceramics used as piezoelectric sensors have electrodes made by metallic film deposition on the ceramic substrate, which has low adherence on substrate surface. During the welding process in electronic component manufacture, the metallic film releases from surface due to the electrode delamination caused by the large difference in thermal expansion gradients between the film and ceramic. Delamination is a serious problem found in the manufacture of ceramic capacitors since the metallic electrode is split into several layers, leading to a component failure as the electrode is not in contact with the ceramic surface anymore. Therefore, in order to increase the film adherence on the ceramic it is proposed in this paper to treat the PZT samples covered with silver metallic films by means of plasma immersion ion implantation (PIII) technique using a high voltage 100-kV/1-μs stacked Blumlein pulser. By using this technique, it is shown that the mechanical adherence of the electrode metallic silver film is increased, which allows the welding process of terminals for the piezoelectric device manufacture without film release failure. Thermal stress relief treatment known as annealing process was also used in this paper as an alternative to the PIII method for increasing the film anchoring on ceramic substrate.
AreaFISPLASMA
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Arrangement 2urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > Adherence Enhancement of...
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doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Contentthere are no files
4. Conditions of access and use
Languageen
Target File06798728.pdf
User Grouplattes
marcelo.pazos@inpe.br
Reader Groupadministrator
marcelo.pazos@inpe.br
Visibilityshown
Archiving Policydenypublisher allowfinaldraft
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Mirror Repositoryiconet.com.br/banon/2006/11.26.21.31
Next Higher Units8JMKD3MGPCW/3ET2RFS
8JMKD3MGPCW/3F358GL
8JMKD3MGPCW/3F35BSP
Citing Item Listsid.inpe.br/bibdigital/2013/10.14.22.20 3
sid.inpe.br/mtc-m21/2012/07.13.14.52.24 2
sid.inpe.br/bibdigital/2013/09.25.21.49 1
DisseminationWEBSCI; PORTALCAPES; COMPENDEX; IEEEXplore; SCOPUS.
Host Collectiondpi.inpe.br/plutao@80/2008/08.19.15.01
6. Notes
NotesSetores de Atividade: Pesquisa e desenvolvimento científico.
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel format isbn lineage mark nextedition orcid parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url
7. Description control
e-Mail (login)marcelo.pazos@inpe.br
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